发明名称 Bi-level multilayered microelectronic device package with an integral window
摘要 A bi-level, multilayered package with an integral window for housing a microelectronic device. The device can be a semiconductor chip, a CCD chip, a CMOS chip, a VCSEL chip, a laser diode, a MEMS device, or a IMEMS device. The multilayered package can be formed of a low-temperature cofired ceramic (LTCC) or high-temperature cofired ceramic (HTCC) multilayer processes with the window being simultaneously joined (e.g. cofired) to the package body during LTCC or HTCC processing. The microelectronic device can be flip-chip bonded and oriented so that the light-sensitive side is optically accessible through the window. A second chip can be bonded to the backside of the first chip, with the second chip being wirebonded to the second level of the bi-level package. The result is a compact, low-profile package, having an integral window that can be hermetically-sealed.
申请公布号 US6495895(B1) 申请公布日期 2002.12.17
申请号 US20020062220 申请日期 2002.02.01
申请人 SANDIA CORPORATION 发明人 PETERSON KENNETH A.;WATSON ROBERT D.
分类号 B81B7/00;H01L23/053;H01L23/10;H01L25/10;H05K1/02;H05K1/18;(IPC1-7):H01L31/020 主分类号 B81B7/00
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