| 摘要 |
PURPOSE: A rotary motion feedthrough device is provided to prevent degradation of a bearing part for rotation of a rotation axis and magnetic fluid for vacuum sealing, by preventing a coupling area of the rotation axis penetrating a gap between a vacuum area and the atmosphere from being infringed by the ion beam used in the vacuum area. CONSTITUTION: The rotation axis(300) penetrates a sidewall of a vacuum chamber to transfer rotary motion. A protection unit protects a coupling portion of the sidewall of the chamber and the rotation axis, connected to the rotation axis. A body covers the coupling portion, connected to the rotation axis. A skirt part covers a gap between the body and the sidewall of the chamber in a lateral direction, hanging down from the body. The protection unit includes the body and the skirt part.
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