发明名称 OPTICAL SWITCH
摘要 PURPOSE: To provide an optical switch which can separately output wavelength multiplexed light beams. CONSTITUTION: A filter 3 where a plurality of interference filters 3a to 3c are juxtaposed is arranged in a groove part 2 crossing optical waveguides 14a and 14b. The wavelength multiplexed light beams which pass through the wavelength multiplexed optical waveguides 14a and 14b can be reflected or transmitted for each wavelength according to the optical property of the interference filters 3a to 3c by supplying a matching oil 25 filled in the groove part 2 by the drive of a micro pump 20 having a piezoelectric element 17 to move the filter 3.
申请公布号 KR20020093631(A) 申请公布日期 2002.12.16
申请号 KR20020032035 申请日期 2002.06.07
申请人 TOKYO ELECTRON LIMITED 发明人 MIYAZAKI KAZUHITO;SADA TETSUYA
分类号 G03F7/30;B05B1/00;G02F1/133;H01L21/027;H01L21/31;(IPC1-7):H01L21/027 主分类号 G03F7/30
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