ULTRA PURE WATER GENERATING APPARATUS AND PREPARATION METHOD THEREOF

摘要

PURPOSE: An ultra pure water generating apparatus which improves deionization efficiency of second deionization equipment by supplying the mixed water of returned deionized water from supply part and deionized water from the first deionization equipment to second deionization equipment is provided. CONSTITUTION: The apparatus comprises a filter(110) which removes the adulteration of raw water; a first deionization equipment(120) which deionizes raw water with a first resistivity; a second deionization equipment(130) which deionizes ultra pure water from the first deionization equipment with the second resistivity of which resistivity is higher than the first resistivity; a supply part(160) which supplies ultra pure water from the second deionization equipment to usage part; the last deionization equipment(150) which is installed between the second deionization equipment and supply part and deionizes ultra pure water from the second deionization equipment with the third resistivity of which resistivity is higher than the second resistivity; a return pipe(170) which returns residual ultra pure water from supply part between the first and the second deionization equipments for supplying mixed ultra pure water from supply part and deionized water from the first deionization equipment to the second deionization equipment.