WAFER DRIER USING MARANGONI EFFECT

摘要

PURPOSE: A wafer drier using a marangoni effect is provided to prevent outside air from being introduced into a drying room, by preventing a gap between the drying room and a cleaning bath or by minimizing the gap. CONSTITUTION: A wafer is cleaned in the cleaning bath(40). Isopropyl alcohol(IPA) vapor is sprayed in the drying room(42) to dry the wafer cleaned in the cleaning bath. A drying room transfer unit transfers the drying room over the cleaning bath. The drying room transfer unit is a robot(48) including a driving unit for vertically transferring the drying room.