VERFAHREN ZUR HERSTELLUNG EINER HALBLEITERANORDNUNG MIT EINER LEITFÄHIGEN SCHICHT

摘要

An element which includes a first film containing no impurity particles due to spontaneous oxidization or residual resist at its surface, and an electrically conductive material layer formed on a surface in contact with the surface of said first film. On the surface of the electrically conductive material layer is formed an insulating compound film as a result of surface reaction with the electrically conductive material layer, and on the surface of said first film is formed a desired second film that is necessary for constituting the element.