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发明名称
WIRBELSCHICHTREAKTOR ZUR ABSCHEIDUNG EINES MATERIALES AUF EINER OBERFLÄCHE MITTELS CVD UND VERFAHREN ZUR HERSTELLUNG EINES BESCHICHTETEN SUBSTRATS MIT DIESEM REAKTOR
摘要
申请公布号
AT229096(T)
申请公布日期
2002.12.15
申请号
AT19980920901T
申请日期
1998.04.28
申请人
SRI INTERNATIONAL
发明人
SANJURJO, ANGEL;LAU, KAI-HUNG;LOWE, DAVID, M.;JIANG, LIQIANG
分类号
B01J8/18;B01J8/24;C23C16/44;C23C16/442;C23C16/448;(IPC1-7):C23C16/44
主分类号
B01J8/18
代理机构
代理人
主权项
地址
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