| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma proof member reinforced in mechanical strength, and moreover capable of standing against exposure of low pressure, high density plasma. SOLUTION: The plasma proof member is characterized in that at least the surface of an alumina based substrate to be exposed to the plasma is formed by an oxide layer of group IIIA element via intermediate layer. In the constitution of the plasma proof member, the intermediate layer of which is preferably composed of 10-80 wt.% oxide of group IIIA element and 90-20 wt.% alumina, and it is more preferable that at least either one of following conditions is provided: the intermediate layer can be a layer of coarse ceramic layer of 0.2-5% porosity, or the difference of coefficient of thermal contraction between the alumina based substrate and the intermediate layer at 1600-1900 deg.C is <=3%. |
