| 摘要 |
PROBLEM TO BE SOLVED: To provide a silicon carbide based porous compact and a method of manufacturing the same which is containing a silicon carbide grain and a silicon nitride grain, excellent in heat resistance, corrosion resistance, chemical resistance, strength, heat shock resistance, and preferable for collecting and eliminating particulates. SOLUTION: The method of manufacturing the silicon carbide based porous compact is characterized in that a compact formed of 70-98 mass% mixed powder composed of 70-95 mass% silicon carbide grain of 10-100 μm mean grain diameter, 5-30 mass % metallic silicon grain of 1-50 μm mean grain diameter, and 2-30 mass % pore generating agent, is heat treated in a nitrogen atmosphere so as to nitride the metallic silicon grain. |
