| 摘要 |
<p>PROBLEM TO BE SOLVED: To precisely make a plurality of resonators different in resonance frequency, in manufacture of thin film resonators made on the same substrate. SOLUTION: The resonance frequency is adjusted, utilizing the mass load effect of an oscillator electrode. A means of oxidizing the electrode is used for the mass load effect. A resonator (50) is equipped with bottom and surface electrodes (56 and 52) which pinches a piezoelectric(PZ) layer (54), and a surface electrode (56) is equipped with a conductor section (57) and an oxidized conductor section (58).</p> |
