发明名称 POSITIVE TYPE PHOTOSENSITIVE RESIN COMPOSITION AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a high sensitivity positive type photosensitive resin capable of giving a pattern with high resolution and a high rate of a residual film and having superior mechanical characteristics, adhesiveness and water absorbing property as film characteristics after curing. SOLUTION: The positive type photosensitive composition comprises 100 pts.wt. alkali-soluble resin (A), 1-100 pts.wt. photosensitive diazoquinone compound (B), a filler (C) whose content F is 2-70 wt.% and 1-40 pts.wt. organosilicon compound (D) or further contains a phenol compound.
申请公布号 JP2002357898(A) 申请公布日期 2002.12.13
申请号 JP20020065898 申请日期 2002.03.11
申请人 SUMITOMO BAKELITE CO LTD 发明人 HORII MAKOTO;HIRANO TAKASHI
分类号 G03F7/022;C08G69/26;G03F7/004;G03F7/037;G03F7/075;H01L21/027 主分类号 G03F7/022
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