CERAMIC HEATER AND MANUFACTURING METHOD THEREFOR

摘要

PROBLEM TO BE SOLVED: To provide an inexpensive ceramic heater which can hold a wafer and uniformly heat the wafer. SOLUTION: On thin green sheets 13 and 15, a heater pattern 14 and filmy electrostatic attraction patterns 16P and 16N are formed by screen printing method, and sandwiched between a ceramic base body 11 of high purity and a ceramic suction surface body 18 and then baked in one body for constituting a thick ceramic heater 10.