发明名称 HEATER PLATE
摘要 PROBLEM TO BE SOLVED: To provide a heater plate uniformizing the surface temperature, improving heat response, reducing the quantity of used heat, and reducing the cost by reducing a variations in the temperature distribution of the face plate surface. SOLUTION: A heat equalizing plate 5 brazed with a sheathed heater 9 is installed on an under surface of a thin face plate 1 composed of a material preventing heat strain, and strong in corrosion resistance.
申请公布号 JP2002359062(A) 申请公布日期 2002.12.13
申请号 JP20010164832 申请日期 2001.05.31
申请人 NIPPON DENNETSU CO LTD 发明人 YOSHIZAWA HARUHIDE;SUZAWA MASASHI;MATSUDA HIROYUKI
分类号 H05B3/20;H01L21/027;(IPC1-7):H05B3/20 主分类号 H05B3/20
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