发明名称 PIEZOELECTRIC STRAIN SENSOR, ITS MANUFACTURING METHOD, AND ELECTRONIC APPARATUS USING THE PIEZOELECTRIC STRAIN SENSOR
摘要 <p>PROBLEM TO BE SOLVED: To provide a piezoelectric strain sensor and an electronic apparatus using it capable of reducing the influence of a vertical vibration mode resulting from the polarization direction of a piezoelectric ceramic around first and second electrodes for precisely detecting strain of a detected object. SOLUTION: This piezoelectric strain sensor is provided with the piezoelectric ceramic 11, the first electrode 12a arranged on the front face of the piezoelectric ceramic 11, the second electrode 12b arranged from the front face of the piezoelectric ceramic 11 to reach its back face. The piezoelectric ceramic 11 between the first electrode 12a and the second electrode 12b has a groove 13.</p>
申请公布号 JP2002357490(A) 申请公布日期 2002.12.13
申请号 JP20010166618 申请日期 2001.06.01
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 MINAMI SEIICHI;GOTO TAIJI
分类号 G01L1/16;C04B41/87;C04B41/88;H01L41/08;H01L41/22;H01L41/29;H01L41/335;(IPC1-7):G01L1/16 主分类号 G01L1/16
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