发明名称 REMOTE MAINTENANCE METHOD, INDUSTRIAL APPARATUS AND SEMICONDUCTOR EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To provide a system and method for remote maintenance and an industrial apparatus which enable a service provider to provide a remote maintenance service that can charge an account to service receivers, provide attentiveness to details, and control the service in accordance with remote maintenance activities and maintenance requestors. SOLUTION: A remote maintenance system connects with an industrial apparatus 123 installed at a manufacturing plant 120 and a work equipment 113 installed at a maintenance center 110 via a network 100. The work equipment 113 transmits instructional information representing maintenance instructions to the industrial apparatus 123. The industrial apparatus 123 executes a process according to the received instructional information, generates information on the charge that shows maintenance fees corresponding to contents of the process executed, and outputs a part or all information for the charge to an output device for the industrial apparatus 123.
申请公布号 JP2002358380(A) 申请公布日期 2002.12.13
申请号 JP20010163663 申请日期 2001.05.31
申请人 HITACHI LTD 发明人 ARIMA JUNTARO;INABA MASAAKI;AIZONO TAKEO;IIIZUMI TAKASHI
分类号 G05B23/02;G06Q30/04;G06Q30/06;G06Q50/00;G06Q50/10;H01L21/02 主分类号 G05B23/02
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