| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device, of which, a device as a whole is made compact without complicating an exhaust conductance adjustment mechanism, and dispenses with a large-scale adjustment work in a convergence lens system. SOLUTION: Passage holes H1, H2 are formed at a first and a second partition walls W1, W2 each dividing a charged particle beam generating part 32, a lens barrel part 33 and a sample chamber 34 in a main body 31, on one hand, exhaust conductance of the inside of the main body is enabled to be adjusted, on the other, by opening and closing the through holes H1, H2 with switching valves V1, V2 moving relatively to the main body 31.
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