| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a device for manufacturing an electron source which can effectively manufacture an electron source of excellent electron emission characteristics by preventing damages to a board due to heat stress and generation of characteristic distribution without using an exhaust system accommodating a large vacuum chamber and high vacuum. SOLUTION: With the manufacturing method of an electron source provided with a board holder 207 supporting an electron source board 10 with a conductor formed, a vessel 12 covering a part of an area of the electron source board 10, a means to make the inside of the vessel into a given atmosphere, and a means of impressing voltage on the conductor, the board holder 207 is provided with an electrostatic chuck 208 electrostatically absorbing the area of the electron source board 10 wider than the heating area from the conductor with voltage applied.</p> |
