发明名称 NITRIDE SEMICONDUCTOR LASER DIODE AND METHOD FOR MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a nitride semiconductor laser diode, having a ridge shape in which ripples are not generated, regardless of low output or high output. SOLUTION: This method for manufacturing a nitride semiconductor laser diode is provided with a ridge, and formed with embedded films at the both sides of the ridge; the embedded films are formed by a process for forming the ridge, and for forming a first insulation film, whose absorption coefficient is high on the exposed face of a p-side nitride semiconductor layer of a region from which the upper part and sidewalls of the ridge are excluded; and a process for forming a second insulating film, whose absorption coefficient is low on the first insulation film and at the sidewalls of the ridge.
申请公布号 JP2002359436(A) 申请公布日期 2002.12.13
申请号 JP20010163321 申请日期 2001.05.30
申请人 NICHIA CHEM IND LTD 发明人 YONEDA AKINORI
分类号 H01S5/223;H01S5/323;H01S5/343;(IPC1-7):H01S5/223 主分类号 H01S5/223
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