THIN FILM FORMING DEVICE AND ORGANIC EL ELEMENT FORMED BY THIS THIN FILM FORMING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a thin film forming device for forming a uniform thin film on a substrate by heating and drying only a material solution applied on the substrate. SOLUTION: This thin film forming device 1A forms the thin film by drying the film forming material solution 3 applied on the substrate 5, and has a microwave generator 11 for generating a microwave 9 for dielectrically heating the solvent of the film forming material solution 3, and a horn antenna 13 for irradiating the film forming material solution 3 applied on the substrate 5 with the microwave 9 generated by the microwave generator 11.