发明名称 OPTICAL INTERFERENCE LENGTH MEASURING SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide an optical interference length measuring system capable of substantially improving work efficiency. SOLUTION: The optical interference length measuring system 1 is provided with a shutter 61 and a supporting body 60 with first and second semitransparent films 64 and 65. By this, by opening the shutter 61 to enable light transmission when location adjustment is performed for approximately coaxially setting first and second optical interference length measuring optical paths Pa and Pb, it is possible to perform adjustment work through the use of both lights transmitted through and reflected by the first and second semitransparent films 64 and 65. Then as it is possible to form the two, first and second optical interference length measuring optical paths Pa and Pb independently on both sides of the supporting body 60 by closing the shutter 61 to cut off the lights, it is possible to improve efficiency in adjustment work.
申请公布号 JP2002357547(A) 申请公布日期 2002.12.13
申请号 JP20010166806 申请日期 2001.06.01
申请人 MITSUTOYO CORP 发明人 OKAMOTO KIYOKAZU;MASUDA HIROKI;UEDA MORIMASA
分类号 G01B11/00;G01N21/41;G01N21/45;(IPC1-7):G01N21/45 主分类号 G01B11/00
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