| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a compact and light-weight stage apparatus, etc., which hardly disturbs a magnetic field. SOLUTION: The stage apparatus 1 comprises an XY roughly moving stage 2 driven by air cylinders 28, 16 in directions X, Y, an inching table 30 disposed on the stage 2, six piezoelectric actuators 41-46 for driving the table 30 in six degrees of freedom (X, Y, Z,θX,θY,θZ), and a wafer table 60 disposed on the inching table 30 for mounting a wafer W.</p> |
