| 摘要 |
PROBLEM TO BE SOLVED: To prevent a brazing filler layer brazing a ceramic plate forming a wafer supporting member and a cylindrical body from leaking caused by thermal stress for a long time. SOLUTION: The wafer supporting member 2 is such constituted that on one side of main surface of plate 3 of aluminum nitride based sintered compact, the wafer W is to be placed is a placing face 4, on the other side of main surface of plate 3, a flange part 11 of the cylindrical body of Fe-Ni-Co alloy is brazed though brazing filler 13. The Fe-Ni-Co alloy of cylindrical body 10 is composed of Ni of 28-32 wt.%, Co of 15-18 wt.%, and the balance substantially Fe, and the grain diameter of which is in a range between 13-150μm, and the thickness of the flange 11 of cylindrical body 10 is 0.1-1 mm.
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