发明名称 ADJUSTING DEVICE AND CORRECTING METHOD
摘要 <p>PROBLEM TO BE SOLVED: To prevent lowering of the quality of an object to be adjusted, and to improve production facility environment in an correcting device. SOLUTION: The correcting device is provided with a adjusting stage 13, a support mechanism 15 and a control mechanism 17. The adjusting stage 13 is arranged in horizontal direction, and the object to be adjusted 12 is placed on it. The support mechanism 15 supports the adjusting stage 13 with its being freely movable in the horizontal direction. The control mechanism 17 has a pull-in position and an advance position. In the pull-in position, it is detached from the object to be adjusted 12 and the adjusting stage 13; when it moves from the pull-in position to the advance position, it pushes the object to be adjusted 12 or the adjusting stage 13; and it moves the object to be adjusted 12 and the adjusting stage 13 in the horizontal direction and adjusts the position in the horizontal direction.</p>
申请公布号 JP2002359275(A) 申请公布日期 2002.12.13
申请号 JP20010162536 申请日期 2001.05.30
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 KANEDA TAKAFUMI;FUKUI YASUYUKI;OKUBO TAKASHI;FUCHIGAMI KATSU
分类号 B23Q3/18;H01L21/68;(IPC1-7):H01L21/68 主分类号 B23Q3/18
代理机构 代理人
主权项
地址