| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a laser annealing apparatus having a simple constitution and featuring easy optical-axis adjustment. SOLUTION: This laser annealing apparatus comprises a first lens 13 that converges the laser beam 12 emitted from a laser device 11, an optical fiber 14 consisting of a multi-mode optical fiber, a second lens 15 that expands the laser beam 12 radiated from the optical fiber 14 to a specified size, an optical fiber bundle 16 which consists of a plurality of multi-mode optical fibers each having a plane of incidence and a plane of radiance, and a cylindrical lens 18 that radiates the laser beam 12 which radiates from the optical fiber bundle 16, by converging the beam only in the minor-axis direction.</p> |
