| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor testing device capable of more precisely performing a calibration, a calibration board therefor, and a calibration method of semiconductor testing device. SOLUTION: The calibration contact board having a first surface and a second surface comprises a conductor capable of making contact with the contact of a socket and a probe contact pad constituted so as to be electrically connected to the conductor on the first surface and the second surface, respectively, and an electric element electrically connected to the probe contact pad. According to this, the state electrically equivalent to the state where an object to be tested is housed and held in the socket is created on the calibration board. Since the calibration can be matched to the actual state by performing the calibration by use of this state, the precision thereof can be more enhanced.
|
