| 摘要 |
PROBLEM TO BE SOLVED: To provide a lens-inspecting apparatus that can obtain data of the image of an interference fringe to accurately inspect the aberration quantity of an inspected lens. SOLUTION: The lens inspection apparatus comprises a beam splitter 3 for branching the luminous flux emitted by a light source to two optical paths, a beam splitter 12 that combines the luminous flux transmitted through a referential lens 7, arranged at one of the branched optical paths and the luminous flux transmitted through an inspected lens 8 arranged at the other branched path, a screen 14 forming the interference fringe image irradiated from the beam splitter 12, a CCD camera 16 for picking image of the formed interference fringe, and a computer 17 obtaining the data of the interference fringe image from the CCD camera 16 to process the data, where a position adjusting scale 18 for the screen 14 is placed and therewith the computer 17 determines strain data from the design values of the inspected lens 8 and the referential lens 7, to compensate the data of the interference fringe image to the data of an ideal interference fringe image using the strain data and then inspect the aberration quantity of the inspected lens 8, by analyzing the data of the ideal interference fringe image compensated to be obtained.
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