发明名称 SEMICONDUCTOR ELEMENT AND METHOD OF FORMING THE SAME
摘要 PROBLEM TO BE SOLVED: To raise the doping level of a semiconductor material. SOLUTION: The semiconductor material contains at least one group III-V region doped with a p-type dopant. The p-type dopant contains a first p-type dopant and at least one second p-type dopant and an impurity. The first p-type dopant is a semiconductor material having an atomic radius which is different from those of the second p-type dopants and impurity, so that local stresses in at least one group III-V region caused by the first p-type dopant may be compensated by local stresses in at least one group III-V region caused by at least one second p-type dopant and impurity and, in addition, the density of the first p-type dopant in at least one group III-V region may be increased.
申请公布号 JP2002359397(A) 申请公布日期 2002.12.13
申请号 JP20020128026 申请日期 2002.04.30
申请人 XEROX CORP 发明人 NORTHRUP JOHN E;VAN DE WALLE CHRISTIAN G
分类号 H01L33/32 主分类号 H01L33/32
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