发明名称 SOI DEVICE WITH REDUCED JUNCTION CAPACITANCE
摘要 <p>A silicon-on-insulator (SOI) field effect transister (FEI) comprises a silicon substrate having silicon layer on top of a buried oxide layer having doped regions and an undoped region. The doped region has a dielectric constant different from the dielectric constant of the doped regions. A body also in the silicon layer separates the source/drains in the silicon layer. The source/drains are aligned over the doped regions and the body is aligned over the undoped region. A gate dielectric is on top of the body and a gate conductor is on top of the gate dielectric.</p>
申请公布号 WO2002099891(A1) 申请公布日期 2002.12.12
申请号 GB2002002355 申请日期 2002.05.20
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