发明名称 APPARATUS FOR EXHAUSTING GAS
摘要 PURPOSE: An apparatus for exhausting gas is provided to easily and stably exhaust toxic gas existing in a chamber by forming a Venturi tube at an exhaust line. CONSTITUTION: The gas exhaust apparatus comprises a chamber(14), a vacuum line(22) formed between the chamber(14) and a pumping part(18), and an exhaust line(20) formed at other end of the chamber(14). The exhaust line(20) further includes a Venturi tube(10) and a solenoid valve(12). The Venturi tube(10) is inhaled toxic gas remaining in the chamber(14) and transferred the toxic gas. The solenoid valve(12) is injected air to the Venturi tube(10).
申请公布号 KR20020092684(A) 申请公布日期 2002.12.12
申请号 KR20010031459 申请日期 2001.06.05
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 CHO, YEON HA
分类号 H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/02
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