发明名称 |
APPARATUS FOR EXHAUSTING GAS |
摘要 |
PURPOSE: An apparatus for exhausting gas is provided to easily and stably exhaust toxic gas existing in a chamber by forming a Venturi tube at an exhaust line. CONSTITUTION: The gas exhaust apparatus comprises a chamber(14), a vacuum line(22) formed between the chamber(14) and a pumping part(18), and an exhaust line(20) formed at other end of the chamber(14). The exhaust line(20) further includes a Venturi tube(10) and a solenoid valve(12). The Venturi tube(10) is inhaled toxic gas remaining in the chamber(14) and transferred the toxic gas. The solenoid valve(12) is injected air to the Venturi tube(10).
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申请公布号 |
KR20020092684(A) |
申请公布日期 |
2002.12.12 |
申请号 |
KR20010031459 |
申请日期 |
2001.06.05 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
CHO, YEON HA |
分类号 |
H01L21/02;(IPC1-7):H01L21/02 |
主分类号 |
H01L21/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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