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发明名称
ELEKTRONSTRAHL-PVD-VORRICHTUNG
摘要
申请公布号
DE60000716(D1)
申请公布日期
2002.12.12
申请号
DE20006000716
申请日期
2000.08.02
申请人
GENERAL ELECTRIC CO., SCHENECTADY
发明人
BRUCE, WILLIAM;EVANS, DOUGLAS;BETSCHER, H.;MARICOCCHI, FRANK;WORTMAN, JOHN;BOWLIN, ALLEN;DILLON, PHILLIPS
分类号
C23C14/30;C23C14/56;(IPC1-7):C23C14/56;C23C14/46
主分类号
C23C14/30
代理机构
代理人
主权项
地址
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