RESISTANCE HEATING EVAPORATION SOURCE FOR ALUMINUM EVAPORATION AND MANUFACTURING METHOD THEREOF

摘要

PURPOSE: A resistance heating evaporation source comprising amorphous carbon or graphite is provided which enables continuous evaporation of aluminum by preventing reaction of aluminum with the holder surface after aluminum is flown out to the outside of the evaporation surface. CONSTITUTION: In a resistance heating evaporation source consisted of amorphous carbon or graphite having a density of 1.4 g/cm¬3 or more, the resistance heating evaporation source for aluminum evaporation is characterized in that a buffer is formed inside the holder surface in an ordinary boat shape for evaporation to block molten aluminum flown in from the evaporation region, and boron nitride is covered on an evaporation region of the boat for evaporation and a holder surface from the evaporation region to the buffer. In a method for manufacturing a resistance heating evaporation source consisted of amorphous carbon or graphite having a density of 1.4 g/cm¬3 or more, the manufacturing method of the resistance heating evaporation source for aluminum evaporation comprises the steps of processing amorphous carbon or graphite in a boat shape for evaporation so that a buffer for blocking molten metal flown in from the evaporation region is formed within the holder surface in an ordinary boat shape for evaporation; forming scratches on the holder surface by rubbing a sandpaper on the evaporation region of the boat for evaporation and the holder surface from the evaporation region to the buffer; and covering boron nitride on the scratch formed part.