INTEGRATED TOOLS WITH TRANSFER DEVICES FOR HANDLING MICROELECTRONIC WORKPIECES

摘要

Transfer devices (134) for handling microelectronic workpieces, apparatus (120) for processing microelectronic workpieces, and methods for manufacturing and using such transfer devices. One embodiment of a transfer device (134) includes a transport unit (210) configured to move along a linear track (132) and a lift assembly carried by the transport unit (210). The transfer device (134) can also include an arm assembly (230) having an arm actuator carried by the lift assembly to move along a lift path and an arm (234) carried by the arm actuator to rotate about the lift path. The arm (234) can include a first extension (236a) projecting from one side of the lift path and a second extension (236b) projecting from another side of the lift path. The arm actuator can rotate the arm about the lift path. The transfer device (134) can also include a first end-effector (250a) and a second end-effector (250b).