| 摘要 |
The invention relates to an assembly for conducting current to a target (16), which forms a cathode of an arc evaporation device, in order to evaporate said target using at least one arc spot generated by an arc that flows between the anode and the cathode. At least the periphery of the target is connected to a fixing device (20) in an electrically conductive manner. The aim of the invention is to guarantee the desired uniform evaporation of the target material. To achieve this, several electrically conductive connections (38, 40), which run in the peripheral region of the target and which in turn are interconnected in an electrically conductive manner by means of an electrical connection (42), originate from the fixing device (20) and/or the target (16). |
