APPARATUS FOR CLEANING SURFACE OF CLEANED BODY

摘要

PURPOSE: An apparatus for cleaning a surface of a cleaned body is provided to perform easily a cleaning process by increasing intervals between the cleaned body and molecules of alien substances. CONSTITUTION: A cleaned body(100) is loaded on a table. A nozzle portion(200) is formed at an upper portion of the table in order to inject a cleaning solution to the cleaned body(100). A heating portion is used for heating the cleaned body(100). A mobile block(70) is installed at a bottom portion of the table in order to support the table. The table is rotated around a rotary shaft(30). A guide rail(40) is formed at a bottom face of the mobile block(70). A plurality of guide blocks(41,42) are installed in the guide rail(40). A motor(50) is installed at the mobile block(70). The driving power of the motor(50) is transmitted to the table by a plurality of connection gears(61,62). A heating plate(20) is formed at a bottom portion of the table. A through-hole(31) is formed on an outer circumference of the rotary shaft(30). A thermal sensor(25) is used for detecting a temperature of the heating plate(20).