Mehrfunktions-Verkapselungsschichtstruktur für photovoltaische Halbleiterbauelemente und Verfahren zu ihrer Herstellung

摘要

Multifunctional encapsulating layer structure for photovoltaic semiconductor elements comprises a gradient layer or a succession of individual layers applied by plasma deposition, and a diffusion barrier layer zone (3) and an elastic polymer protective layer zone (4), on which is applied a scratch-resistant surface layer (5) or a polymer film (23). The production of the structure is also claimed by: (a) applying the barrier layer zone (3) to the photovoltaic structure (2) by plasma deposition, especially using a gas mixture containing an organosilicon compound and a small amount of a reactive gas; (b) applying an elastic polymer protective layer zone (4) by plasma deposition using a gas mixture containing an organosilicon compound or volatile aromatic compound and a high amount of reactive gas; and (c) plasma treating a polymer film (23) on one side and placing on the elastic polymer protective layer zone