发明名称 INJECTION SEEDED F2 LASER WITH LINE SELECTION AND DISCRIMINATION
摘要 A narrow band F2 laser system having two laser subsystems. The first laser subsystem is a seed laser (100) and provides a very narrow band pulsed beam at a first narrow wavelength range corresponding to a first natural emission line of the F2 laser system. This beam is injected into the gain medium of the second laser subsystem (102) in a first direction where the beam is amplified to produce a narrow band pulsed output beam. The seed laser (100) also produces a second pulsed beam at a second wavelength range corresponding to a second natural emission line of the F2 laser. This line is injected into the gain medium of the second laser subsystem (102) in a second direction opposite said first direction. The second beam is amplified in the gain medium of the second laser subsystem of the second laser subsystem and depletes the gain medium of gain potential at the second wavelength range. Thus, the portion of light at the second wavelength range in the output beam (124) is greatly reduced.
申请公布号 WO02099938(A1) 申请公布日期 2002.12.12
申请号 WO2002US21867 申请日期 2002.04.03
申请人 CYMER, INC.;ONKELS, ECKEHARD, D.;SANDSTROM, RICHARD, L.;NESS, RICHARD, M.;PARTLO, WILLIAM, N.;ERSHOV, ALEXANDER, I.;OH, CHOONGHOON 发明人 ONKELS, ECKEHARD, D.;SANDSTROM, RICHARD, L.;NESS, RICHARD, M.;PARTLO, WILLIAM, N.;ERSHOV, ALEXANDER, I.;OH, CHOONGHOON
分类号 H01L21/027;G03F7/20;H01S3/03;H01S3/036;H01S3/038;H01S3/041;H01S3/08;H01S3/0943;H01S3/097;H01S3/0971;H01S3/0975;H01S3/102;H01S3/134;H01S3/137;H01S3/139;H01S3/22;H01S3/223;H01S3/225;H01S3/23;(IPC1-7):H01S3/10;H01S3/00 主分类号 H01L21/027
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