Adaptronic-combi-module e.g. for motor vehicles and aircraft, includes sensor-type and actuator-type micro-elements in micro-systems

摘要

An Adaptronic 'combi-module' has one or more actuator-type micro-systems (2) formed by actuator-type micro-elements (8) and first drive-elements (8).The sensor-type and the actuator-type micro-elements of the micro-systems (1,2) are monolithically integrated in a common matrix (3) having less surface loading than the actuator-type micro-system (2). An Independent claim is given for a method of operating a 'combi-module.'