发明名称 |
Apparatus for heating substrates comprises emitters for emitting electromagnetic waves, reflectors for (in)directly directing electromagnetic radiation released by emitters onto substrate, and rigid or adjustable screens |
摘要 |
An apparatus for heating substrates comprises one or more emitters (1) for emitting electromagnetic waves in the region of 200-10000 nm; one or more reflectors (2) for (in)directly directing the electromagnetic radiation released by the emitters onto a substrate; and one or more rigid or adjustable screens (3) for electromagnetic radiation released by the emitters and/or reflectors in the direction of the substrate. Preferred Features: The width of the energy distribution of a homogeneous beam is in the region of 0.1-150, preferably 1-100, especially 4-60 mm, and the length of the energy distribution of a homogeneous beam is in the region of 0.1 mm -10 m, preferably 10 mm - 8 m, especially 20 mm - 6 m. The screens are mechanically, electrically, hydraulically and/or pneumatically adjusted. The screens have various geometries. The reflectors have a polygonal cross-section.
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申请公布号 |
DE10126019(A1) |
申请公布日期 |
2002.12.12 |
申请号 |
DE20011026019 |
申请日期 |
2001.05.28 |
申请人 |
ACKERMANN, GUNTHER;GERSTENDOERFER-HART, BARBARA |
发明人 |
ACKERMANN, GUNTHER;GERSTENDOERFER-HART, BARBARA |
分类号 |
B01J19/12;H01L21/00;H05B3/00;(IPC1-7):H05B6/00;H01L21/324;B01J19/08 |
主分类号 |
B01J19/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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