发明名称 Method of producing two-dimensional phase type optical element
摘要 Disclosed is a method of producing a two-dimensional phase type optical element, wherein a first mask and a second mask made of different materials and both having a stripe-like shape are superposedly formed on a substrate, along different directions, respectively, and wherein positions of all levels to be defined are determined on the basis of at least one of the first and second masks.
申请公布号 US2002187431(A1) 申请公布日期 2002.12.12
申请号 US20000504592 申请日期 2000.02.15
申请人 TANAKA ICHIRO 发明人 TANAKA ICHIRO
分类号 H01L21/027;G02B5/18;G02B5/32;G03F1/00;G03H1/04;(IPC1-7):G02B5/32;G03F9/00 主分类号 H01L21/027
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