| 摘要 |
An inventive loading and storage station has a plurality of storage shelves positioned above one or more docking stations. Each storage shelf is configured to store a substrate carrier. A factory load location is positioned below the docking station, and a robot having an end effector coupled to a support structure that comprises a vertical guide and a horizontal guide is configured so that the end effector may move horizontally and vertically among the docking station, the plurality of storage shelves and the factory load location so as to transport substrate carriers thereamong. In one aspect the plurality of storage shelves and at least one of the robot's vertical and horizontal guides are fixedly coupled to a support frame so as to create a modular unit. In a further aspect a conveyor is positioned below the docking station and is adapted to transport substrate carriers to the factory load location. In this aspect the conveyor and the robot's horizontal guide may extend along parallel lines.
|
