发明名称 Method and structure for buried circuits and devices
摘要 A method and structure for fabricating an electronic device using an SOI technique that results in formation of a buried oxide layer. The method includes fabricating at least one first component of the electronic device and fabricating at least one second component of the electronic device, wherein the first component and the second component are on opposite sides of the buried oxide layer, thereby causing the buried oxide layer to perform a function within the electronic device. Entire circuits can be designed around this technique.
申请公布号 US2002185684(A1) 申请公布日期 2002.12.12
申请号 US20010879530 申请日期 2001.06.12
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CAMPBELL JOHN E.;DEVINE WILLIAM T.;SRIKRISHNAN KRIS V.
分类号 H01L21/02;H01L21/3205;H01L21/336;H01L21/76;H01L21/762;H01L21/8234;H01L21/8238;H01L21/8242;H01L21/84;H01L23/52;H01L27/06;H01L27/08;H01L27/088;H01L27/092;H01L27/108;H01L27/118;H01L27/12;H01L29/786;(IPC1-7):H01L27/12;H01L29/76 主分类号 H01L21/02
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