发明名称 |
Incremental tuning process for electrical resonators based on mechanical motion |
摘要 |
The present invention is a method for adjusting the resonant frequency of a mechanical resonator whose frequency is dependent on the overall resonator thickness. Alternating selective etching is used to remove distinct adjustment layers from a top electrode. One of the electrodes is structured with a plurality of stacked adjustment layers, each of which has distinct etching properties from any adjacent adjustment layers. Also as part of the same invention is a resonator structure in which at least one electrode has a plurality of stacked layers of a material having different etching properties from any adjacent adjustment layers, and each layer has a thickness corresponding to a calculated frequency increment in the resonant frequency of the resonator.
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申请公布号 |
US2002185936(A1) |
申请公布日期 |
2002.12.12 |
申请号 |
US20020192420 |
申请日期 |
2002.07.10 |
申请人 |
BARBER BRADLEY PAUL;WONG YIU-HUEN |
发明人 |
BARBER BRADLEY PAUL;WONG YIU-HUEN |
分类号 |
B44C1/22;G04F5/06;H03H3/04;(IPC1-7):H01L41/08 |
主分类号 |
B44C1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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