METHOD OF FORMING AN INTEGRATED CIRCUIT DEVICE USING DUMMY FEATURES AND STRUCTURE THEREOF

摘要

A method for forming an integrated circuit device having dummy features (14) and the resulting structure are disclosed. One embodiment comprises a first active feature (25) separated from a substantially smaller second active feature (12) by a dummy-available region void of active features. Within the dummy-available region and in close proximity to the second active feature exists a dummy feature (14).