POLISHING DEVICE

摘要

A polishing device capable of preventing the tooth parts of carriers for a thin work from being damaged,wherein the height of the outer edge parts of the carriers(100)rotating on its axis while revolving in the state of being meshed with a sun gear(11)and an internal gear(12)is formed higher than the height of work holding parts on the inside of the carriers for reinforcing the carriers,and the upper and lower surfaces of the work held in the through holes of the work holding parts of the carriers(100)are polished simultaneously by a lower surface plate(13)having the carriers(100)holding the work placed thereon and an upper surface plate(35)inserted from the upper side into the work holding parts on the inside of the outer edge parts of the carriers(100)while rotating the sun gear(11)and the internal gear(12).