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发明名称
ÜBERWACHUNGSTECHNIK FÜR EINEN TEILCHENSTRAHL
摘要
申请公布号
DE69903827(D1)
申请公布日期
2002.12.12
申请号
DE19996003827
申请日期
1999.07.13
申请人
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INC., GLOUCESTER
发明人
RICHARDS, L.;TOKORO, NOBUHIRO
分类号
G21K5/04;B01J19/08;G01R19/00;G01T1/29;H01J37/317;H01L21/265;(IPC1-7):G01R31/25
主分类号
G21K5/04
代理机构
代理人
主权项
地址
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