| 摘要 |
<p>A wafer-handling robot is installed in a linear transfer chamber. The robot includes two cars mounted to travel along a linear guide. A first arm is pivotally mounted on the first car and a second arm is pivotally mounted on the second car. A robot wrist is pivotally mounted on outer ends of the two arms. When the cars are driven toward each other, the robot wrist is extended away from the linear guide. When the cars are driven away from each other, the robot wrist is retracted toward the linear guide.</p> |
