PLASMA DISCHARGE SYSTEM USING MULTIPLE RESONANT MODES

摘要

PURPOSE: A plasma discharge system using multiple resonant modes is provided to enhance energy coupling efficiency and improve the uniformity of plasma by exciting a multi-mode overlaid with the multiple resonant modes within a resonator. CONSTITUTION: A driver(1) is used for generating microwaves. A divider(2) is used for receiving and passing the microwaves from the driver(1). A traveling wave tube(3) is used for receiving the microwaves from the divider(2) and generating multiple frequencies having wide bandwidth. The divider(2), a circulator(4), and a dummy load(6) are used for preventing reflection and controlling the microwaves. The circulator(4) is used for passing the microwaves to a resonator(7). The dummy load(6) is used for absorbing the heat from the microwaves by using a water cooling unit. A directional coupler(5) is used for measuring a forward power inputted into the resonator(7) and a reflected power reflected from the resonator(7). The resonator(7) is used for generating plasma by using the multiple modes.