VERTICAL MAGNETIC FIELD DETECTION APPARATUS

摘要

PURPOSE: A vertical magnetic field detection apparatus is provided to reduce manufacturing cost and easily detect vertical magnetic field, while allowing three-axis magnetic fields to be measured at the same time. CONSTITUTION: A vertical magnetic field detection apparatus, comprises electrode anchors(12) arranged onto a substrate, which apply or receive current; a movable unit(14) supported by electrode anchors through a spring(13), which is arranged to be elastically movable by a stimulation applied from an external source; movable comb electrodes(17) arranged at the side of the movable unit; sensing anchors(15) arranged on the substrate; fixed comb electrodes(16) supported by sensing anchors and arranged to correspond to movable comb electrodes; and a conduction line(20) formed at electrode anchors, spring and the movable unit so as to maintain the advance path of the current applied from the electrode anchor, in a single direction at the movable unit.