| 摘要 |
PURPOSE: To provide a treatment method using XY stage capable of suppressing the deterioration of arrangement accuracy of an XY stage even when the regularity of movement of the stage is broken. CONSTITUTION: An object to be treated is held on the XY stage capable of translating in mutually orthogonal X- and Y-axial directions. The XY stage is moved to a first position. The XY stage is run up in the X- and Y-axial negative directions and stopped in a second position. While the XY stage is stopped in the second stage, a treatment is performed to the object. The XY stage is moved in the Y-axial negative direction by a certain distance, and the treatment to the object is performed while the XY stage is stopped. This procedure is repeatedly executed. |
