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发明名称
METHOD AND DEVICE FOR COATING SUBSTRATES
摘要
申请公布号
EP1264004(A1)
申请公布日期
2002.12.11
申请号
EP20010929385
申请日期
2001.03.01
申请人
SCHOTT GLAS;SAKAGAMI, ETSURO
发明人
DANIELZIK, BURKHARD;KUHR, MARKUS;MOEHL, WOLFGANG
分类号
G02B1/10;C23C16/511;H01J37/32;(IPC1-7):C23C16/511
主分类号
G02B1/10
代理机构
代理人
主权项
地址
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